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Servo drives - Apogee & Kepler

High-precision PWM servo drives with linear-grade performance

  • Apogee S3_oblique (2).jpg
  • Kepler D1_oblique.jpg
  • Quasar, Cygnus, Apogee, Kepler 7.png
  • Servo DriveApogee&Kepler-Elevated-Right.jpg

Achieve unmatched motion control accuracy with our Apogee and Kepler series PWM servo drives, engineered for semiconductor, metrology, and advanced manufacturing applications.

The Apogee & Kepler series deliver linear-level current quality using a filtered 200 kHz PWM architecture, ensuring ultra-low noise and minimal ripple for constant velocity and nanometer-class positioning. Apogee offers up to 24-bit current sensing with custom fluxgate sensors for the highest precision, while Kepler offers 18-bit current sensing with dual-axis capabilities.

EtherCAT connectivity, dual-loop feedback, and broad encoder support enable seamless integration into synchronized systems. Paired with the Prodrive Motion Platform (PMP), these drives provide rapid commissioning, advanced diagnostics, and MATLAB-Simulink compatibility for ultimate results.

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  • Linear‑level output with PWM efficiency

    Precision of legacy linear amplifiers with higher efficiency.

  • Extreme current‑loop fidelity

    800 kHz control bandwidth, delivers ultra‑fast response and exceptional linearity

  • Dual-axis functionality

    saves space & complexity while reducing communication delay

  • <1nm stand still jitter

    Known for the most precise servo drive in the market

Servo DriveApogee&Kepler-Elevated-Right.png

Features

  • Filtered 200 kHz PWM switching for linear-grade current quality
  • Extreme current-loop fidelity with 800 kHz control bandwidth
  • Dual-loop feedback for linear encoder and interferometer
  • EtherCAT SubDevice operation with CoE compliance
  • Wide encoder compatibility: incremental, analog, and absolute protocols
  • Integrated output and EMI filtering for minimal external components
  • High-resolution current sensing (up to 24-bit on Apogee)
  • Dedicated high-speed Ethernet diagnostics for real-time tuning
  • MATLAB-Simulink integration via Prodrive's PMP controllers
  • Compact design with advanced thermal management
  • Compliance with IEC/UL 61800-5-1 and EMC standards

Benefits

  • Extreme precision

    Delivers linear-grade current quality with 200 kHz PWM and 800 kHz current-loop frequency for nanometer-class positioning.

  • Efficiency

    Combines PWM architecture with integrated filtering to reduce heat and power loss compared to traditional linear amplifiers

  • Flexibility

    Supports a wide range of motors (rotary, linear, voice coil) and encoder types for diverse motion applications

  • Fast Integration

    EtherCAT connectivity and PMP software enable rapid commissioning and seamless system integration

  • Scalability

    Ideal for single-axis or multi-axis setups in semiconductor, metrology, and advanced packaging environments

  • Advanced Diagnostics

    High-speed Ethernet diagnostics for real-time tuning and measurements

Applications

  • Wafer inspection

    Application-5.jpg

  • Advanced Packaging

    Advanced packaging

  • Atomic force microscope

  • Lithography

    Lithography
Apogee Kepler
S3-120/07 D1-120/07 D1-200/04 D3-200/04
Power input
Input voltage range 60-120VDC 60-120VDC 60-200VDC 60-200VDC
Input voltage, absolute max 140VDC 140VDC 220VDC 220VDC
Input current 7ARMS 7ARMS 9ARMS 9ARMS
Input current, peak 12Apk 12Apk 21Apk 21Apk
Auxiliary input voltage 22-26VDC (optional)
Auxiliary input current max 2ARMS (4Apk)
Actuator outputs
Number of motor outputs 1 2 2 2
Supported motor types 3-phase (linear and rotary) 1-phase (voice coil) 1-phase (voice coil) 3-phase (linear and rotary)
Maximum phase current 6.5ARMS (60s) 6.5ARMS (60s) 4ARMS (60s) 4ARMS (60s)
Peak phase current (1s) 16Apk 16Apk 20Apk (200ms) 20Apk (200ms)
Maximum output voltage (line-line, typical) 0...70VRMS 0...70VRMS 0...115VRMS 0...115VRMS
Rated switching frequency 200kHz
Output frequency 0-6000Hz 0-6000Hz 0-4000Hz 0-4000Hz
Internal brake resistor Y N N Y
External brake resistor N
Encoder inputs
Number of encoder inputs 2 2 2 2
Supported types Digital quadrature (A/B/I)
Analog sin/cos 1Vpp (14bit)
Digital hall (5V)
EnDAT 2.1/2.2
Hiperface DSL 4-wire
BiSS C
SSI
Maximum signal fequency with no missing pulses 4MHz
Maximum baudrate (digital encoders) 32MHz
Encoder supply (each input) 5V 500mA / 10V 500mA (with remote voltage sense)
General purpose inputs/outputs
Isolated digital inputs 4 x 24V input (VIH≥11V, VIL≤5V, IIN<15mA)
Isolated digital outputs 4 x 30V / 500mA
Non-isolated digital inputs 4 x TTL
Non-isolated digital outputs 2 x 24V - 1A + 2x 24V - 200mA + 4x TTL output
Analog inputs 2 x ±10V differential input, 16bit
Analog outputs 2 x ±10V differential output, 16bit
Brake outputs -
Control
Interface Ethernet / EtherCAT
Update rate 100Hz - 20kHz
Performance
Offset error [%of Ipk] 0.004 0.004 0.0025 0.0025
Offset drift [%of Ipk] 0.0004 0.0004 0.0007 0.0007
Gain error [%of Ipk] 0.007 0.007 0.0082 0.0082
Gain drift max 150ppm max 150ppm max 0.15% max 0.15%
Linearity error [ppm of Ipk] max 50ppm max 50ppm max 550ppm max 550ppm
Current loop, small signal bandwidth (-3dB) Typical 6-7kHz Typical 6-7kHz Typical 2-4kHz Typical 2-4kHz
Output current noise spectral density @100Hz max 1μA/√Hz max 1μA/√Hz max 20μA/√Hz max 20μA/√Hz
Output current noise, rms 1Hz-10kHz max 110uArms max 110uArms max 600uArms max 600uArms
Output current noise, rms 1Hz-20MHz max 150uArms max 150uArms max 800uArms max 800uArms
Functional safety
Applicable standard -
STO -
SBC -
Mechanical
Dimensions (WxDxH) 271 mm x 442 mm x 70mm
Mass (typical) 7
Climatic conditions
Operating temperature range 10°C - 40°C
Operating humidity range 20-80% non-condensing
Shock&Vibration IEC61800-5-1, IEC60068-2-6 (Fc)
Lifetime >10 years