Vacuum linear motors - Gryphon
High-force, ironless linear motors for vacuum environments
Designed for high-precision applications in vacuum and cleanroom environments, Gryphon motors deliver smooth, cogging-free motion thanks to their ironless design. With peak forces up to 414 N and speeds reaching 1.5 m/s, they enable fast and accurate positioning for semiconductor and inspection systems.
Advanced thermal management with flat-wire coil technology ensures efficient heat dissipation, while integrated PT1000 sensors provide precise temperature monitoring. Magnetic field shielding is incorporated for sensitive applications, minimizing interference and ensuring optimal performance in environments with strict electromagnetic requirements. Gryphon motors integrate seamlessly with Prodrive servo drives and motion controllers for a complete motion solution.
High-force, ironless linear motors for vacuum environments
Designed for high-precision applications in vacuum and cleanroom environments, Gryphon motors deliver smooth, cogging-free motion thanks to their ironless design. With peak forces up to 414 N and speeds reaching 1.5 m/s, they enable fast and accurate positioning for semiconductor and inspection systems.
Advanced thermal management with flat-wire coil technology ensures efficient heat dissipation, while integrated PT1000 sensors provide precise temperature monitoring. Magnetic field shielding is incorporated for sensitive applications, minimizing interference and ensuring optimal performance in environments with strict electromagnetic requirements. Gryphon motors integrate seamlessly with Prodrive servo drives and motion controllers for a complete motion solution.
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Vacuum-compatible Design
Engineered for cleanroom and high-vacuum environments, ensuring zero contamination and reliable performance in semiconductor and inspection applications.
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Ironless technology for smooth motion
Delivers extremely low force ripple and eliminates cogging forces, enabling precise linear movement with excellent servo performance.
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Magnetic Field Shielding for Sensitive Applications
Incorporates advanced magnetic shielding to minimize electromagnetic interference, ensuring reliable performance in environments with strict sensitivity requirements.
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Optimized thermal management
Flat-wire coil technology maximizes heat transfer, while integrated PT1000 sensors ensure accurate temperature monitoring for stable operation.
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High force & speed
Generates up to 414 N peak force, with continuous force up to 249 N, and achieves speeds of 1.5 m/s for demanding long-stroke applications.
Application areas
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Electron microscopy & scientific instruments
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Flat panel display manufacturing
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EUV lithography
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Photomask repair
Technical specifications
| Model | Gryphon-M | Gryphon-L |
|---|---|---|
| Height (mm) | 39 | 45 |
| Depth (mm) | 118 | 135 |
| Number of coils | 9 | 12 |
| Width (mm) | 263 | 371 |
| Peak Force (N) | 269 | 414 |
| Continuous Force (N) | 161 | 249 |
| Motor Constant (N²/W) | 566 | 1330 |