Voice coil - Iris
High-Performance Short-Stroke Linear Actuator
The Iris series voice coil actuators deliver exceptional performance for short-stroke applications requiring high bandwidth and low stiffness. Designed with an ironless architecture, Iris actuators eliminate attraction forces, ensuring smooth, frictionless motion and zero wear. This makes them ideal for semiconductor manufacturing, inspection systems, and active vibration isolation.
Unlike conventional actuators, Iris uses a stationary magnet yoke and a movable coil unit, enabling fast response and high force output without mechanical contact. The result is high dynamic performance, minimal heat buildup, and long operational life.
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Low stiffness & high bandwidth
Ideal for short-stroke applications requiring fast and precise movement, enabling high-performance in semiconductor manufacturing and active vibration isolation.
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Ironless design - zero attraction force
No magnetic force when powered off, simplifying installation and eliminating friction or wear for long-lasting reliability.
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Compact yet powerful
Delivers up to 250 N continuous force and 1150 N peak force
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Seamless integration
Works flawlessly with Prodrive's servo drives
Application areas
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Wafer inspection
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Advanced Packaging
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Lithography
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Atomic force microscope
Technical specifications
